The first major parts of ASML’s first production high-NA EUV machine have been delivered to Intel’s Oregon development fab. Intel expects to have received six of the machines by the end of next year,

“We’re excited and proud to ship our first high NA EUV system to Intel,” said ASML in a Twitter post yesterday.

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Intel CEO Pat Gelsinger secured the rights to the first deliveries of the latest version of ASML’s EUV lithography machine shortly after he took over as Intel CEO in 2021 with a commitment to restore Intel to industry process leadership.

Intel’s first production with the high-NA machine, which costs $275 million, will be in 2025 – the year when Intel aims to regain industry technology leadership with its 18A process.

 

In 1997 Intel co-founder CEO and chairman started putting together a consortium to work with the US National Laboratories  to try and turn the concept of EUV into a reality.

“We have to make optics on a production scale that can barely be achieved now, if at all,” said Moore at that time.