University of Cambridge spin-out Sorex Sensors has launched the first product based on its film bulk acoustic resonator (FBAR) technology.

It is a particulate sensor, and has been delivered alongside a development kit. Use dust control systems inside air purifier systems and atomic layer deposition tools is expected.

Claimed mass sensitivity is down to femtograms. “This makes it more accurate and responsive than existing sensors so it can detect even a trace of harmful compounds,” according to the firm. “The discrete, non-specific sensor is capable of detecting particles in the sub-PM2.5 range.”

“Our particulate sensor – to help with dust control – is the first step towards our development of an array of sensors for indoor air quality monitoring,” said Sorex CTO Dr Mario de Miguel Ramos. “The aim is for our sensors to act as your eyes, ears and nose to detect any dangerous build-up of compounds before they reach harmful levels.”

FBAR technology comprises a thin film of piezoelectric material that is made to resonate. Attachment of mass to the surface changes the resonant frequency and provides an accurate measurement of the amount of mass on the sensing area. Sorex FBARs are fabricated on a silicon wafer.